The Global Semiconductor EUV Pellicles Market was valued at USD 72 Million in 2024 and is projected to reach USD 163 Million by 2032, growing at a Compound Annual Growth Rate (CAGR) of 9.3% during the forecast period (2024–2032). This robust expansion is being driven by the accelerating adoption of extreme ultraviolet (EUV) lithography across leading semiconductor foundries, the surging global demand for sub-7nm chips powering artificial intelligence and high-performance computing, and rapid material science innovations enabling higher transmittance and durability in pellicle technology.

As the semiconductor industry races toward smaller, more powerful chip nodes, the spotlight is firmly on the specialized manufacturers supplying the ultra-thin protective films that make precision EUV lithography possible. In this blog, we profile the Top 10 Companies in the Semiconductor EUV Pellicles Industry—a mix of lithography equipment giants, advanced materials specialists, and emerging innovators shaping the future of global chip fabrication.

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🔺 1. ASML Holding N.V.

Headquarters: Veldhoven, Netherlands
Key Offering: EUV Lithography Systems, EUV Pellicle Technology, Photomask Protection Solutions

ASML is the undisputed global leader in EUV lithography and the foundational architect of the EUV pellicle ecosystem. The company pioneered commercial EUV pellicle development and has since licensed production to strategic partners while maintaining its dominant role in setting technical standards. Its deep integration with every major semiconductor foundry gives ASML unparalleled influence over pellicle specifications and performance requirements. ASML’s pellicle technology is designed to protect photomasks from particle contamination across thousands of lithography exposures, making it indispensable for high-volume manufacturing at the 5nm and 3nm nodes.

Key Innovation Highlights:

• Developed and commercialized the first generation of EUV pellicles for high-volume manufacturing

• Licensed pellicle mass production to Mitsui Chemicals to scale supply globally

• Actively investing in next-generation pellicle standards for high-NA EUV systems

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Semiconductor EUV Pellicles Market – View in Detailed Research Report

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️⃣ 2. Mitsui Chemicals, Inc.

Headquarters: Tokyo, Japan
Key Offering: Licensed EUV Pellicles, Next-Generation CNT Pellicles

Mitsui Chemicals is the primary licensed manufacturer of ASML-developed EUV pellicles and began mass production in 2021, quickly establishing itself as a critical supplier to the global semiconductor supply chain. The company’s expertise in advanced polymer and material chemistry has allowed it to translate laboratory-grade pellicle designs into high-yield, commercially scalable products. Furthermore, Mitsui is constructing additional production capacity specifically targeting carbon nanotube (CNT) pellicles, which are expected to become essential for high-power EUV systems operating above 500W. This positions Mitsui not only as a current market leader but as a strategically important supplier for the next decade of semiconductor scaling.

Key Innovation Highlights:

• Mass production of EUV pellicles commenced in 2021 under ASML license

• Developing CNT pellicle manufacturing capacity expected online by 2025

• Advancing material deposition processes to improve yield and reduce per-unit costs

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⋼️ 3. Canatu Oy

Headquarters: Helsinki, Finland
Key Offering: Carbon Nanotube (CNT) EUV Pellicles

Canatu is one of the most closely watched innovators in the EUV pellicle space, having collaborated with the Belgian semiconductor research organization imec since 2015 to develop CNT-based pellicle solutions. CNT pellicles represent a fundamental leap beyond current silicon-based designs, offering superior thermal stability, mechanical strength, and the potential for EUV transmittance rates exceeding 93% under laboratory conditions. While Canatu’s products are still progressing through development and qualification phases, the company’s technical trajectory and partnership with imec underscore its relevance as a future market disruptor. As EUV source power levels climb toward 600W for next-generation systems, CNT pellicles like those in Canatu’s pipeline will likely become the standard.

Key Innovation Highlights:

• Long-standing R&D collaboration with imec on CNT pellicle technology since 2015

• CNT solutions targeting transmittance above 93% for high-power EUV applications

• Focused on overcoming thermal stability and uniformity challenges at advanced nodes

Download FREE Sample Report:
Semiconductor EUV Pellicles Market – View in Detailed Research Report

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🅴 4. S&S Tech Co., Ltd.

Headquarters: Gyeonggi-do, South Korea
Key Offering: High-Transmittance EUV Pellicles (>90% EUVT)

S&S Tech is one of South Korea’s leading pellicle manufacturers and made a significant technical milestone in 2021 by successfully developing EUV pellicles with transmittance exceeding 90%—a benchmark that places it squarely alongside the industry’s frontrunners. The company has been actively supplying pellicles for DUV lithography for years, and its expansion into EUV pellicle technology reflects South Korea’s broader strategic push for semiconductor supply chain self-sufficiency. With major domestic customers including Samsung Electronics and SK Hynix, S&S Tech benefits from both proximity to leading-edge foundries and strong government-backed semiconductor industrial policy. The company is investing in EUV pellicle qualification programs at multiple foundry customers across the Asia-Pacific region.

Key Innovation Highlights:

• Achieved EUV pellicle transmittance above 90% as of 2021

• Expanding qualification at advanced foundries in South Korea and Taiwan

• Supported by South Korea’s national semiconductor self-sufficiency initiative

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🅵 5. FST Co., Ltd.

Headquarters: Daejeon, South Korea
Key Offering: EUV Pellicle Development, Photomask-Related Components

FST is another South Korean company actively developing EUV pellicle technology, with a product portfolio that also encompasses photomask-related components and semiconductor packaging materials. While FST’s EUV pellicle program is still in the development and early qualification stages, its ongoing efforts reflect the intensifying competition to diversify global pellicle supply away from the current concentrated market structure. The company benefits from South Korea’s well-established semiconductor ecosystem and has access to domestic testing environments through partnerships with local chip manufacturers. FST’s progress is being watched closely by industry observers as a signal of how quickly alternative suppliers can close the technical gap with established leaders.

Key Innovation Highlights:

• Active EUV pellicle R&D program targeting commercial-grade transmittance performance

• Diversified portfolio across photomask and semiconductor component segments

• Positioned to benefit from foundry supplier diversification programs in Asia-Pacific

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🅶 6. Applied Materials, Inc.

Headquarters: Santa Clara, California, USA
Key Offering: Thin Film Deposition Equipment, EUV-Compatible Materials Processing

Applied Materials is a global leader in semiconductor equipment and materials engineering, and while the company is not a standalone pellicle manufacturer, its deposition and materials engineering technologies are deeply embedded in the EUV pellicle manufacturing process. Applied Materials’ chemical vapor deposition (CVD) and atomic layer deposition (ALD) systems are used by pellicle manufacturers to achieve the atomic-level precision required for multi-layer pellicle structures. The company’s ongoing R&D into advanced thin-film materials directly influences pellicle performance milestones, making it a critical behind-the-scenes enabler of the entire EUV pellicle supply chain. Applied Materials’ scale and global reach give it a unique position in shaping the technology roadmap for this sector.

Key Innovation Highlights:

• ALD and CVD systems powering precision pellicle material deposition processes

• R&D collaboration with chipmakers on next-generation thin-film materials for EUV

• Strategic presence across all major semiconductor manufacturing hubs globally

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Semiconductor EUV Pellicles Market – View in Detailed Research Report

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🅷 7. Lam Research Corporation

Headquarters: Fremont, California, USA
Key Offering: Etch and Deposition Equipment, EUV Process Enablement

Lam Research is one of the world’s leading semiconductor process equipment companies, with a particular strength in etch and thin-film deposition technologies that are directly relevant to EUV pellicle fabrication. Lam’s plasma etch systems are used to create the precise film structures that define pellicle optical and mechanical characteristics. The company has been deepening its investment in EUV-process-compatible technologies as chipmakers push toward 2nm and beyond. Like Applied Materials, Lam Research serves as a foundational infrastructure supplier whose innovations in materials processing directly enhance the performance envelope achievable in pellicle manufacturing. Its customer relationships with TSMC, Samsung, and Intel Foundry provide a clear window into the technical requirements driving next-generation pellicle development.

Key Innovation Highlights:

• Plasma etch systems enabling precise film structure formation in pellicle manufacturing

• Expanding EUV-compatible process technology portfolio ahead of 2nm production ramp

• Strong relationships with all Tier-1 semiconductor foundries driving application insight

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🅸 8. Shin-Etsu Chemical Co., Ltd.

Headquarters: Tokyo, Japan
Key Offering: Photomask Substrates, Silicon-Based Semiconductor Materials

Shin-Etsu Chemical is one of the world’s largest producers of semiconductor-grade silicon and photomask substrates, making it an essential materials supplier in the broader EUV lithography ecosystem. The company’s silicon and silica products are foundational to the fabrication of pellicle frames and photomask blanks, and its advanced materials chemistry capabilities position it as a natural player in the evolution toward multi-layer EUV pellicle structures. Shin-Etsu has consistently demonstrated the ability to scale ultra-pure material production at volumes that match the demanding requirements of high-volume semiconductor manufacturing, a capability that becomes increasingly valuable as EUV adoption accelerates across Asia and North America.

Key Innovation Highlights:

• World-leading supplier of semiconductor-grade silicon and photomask substrate materials

• Ultra-high purity material capabilities critical for EUV pellicle frame and component fabrication

• Positioned to expand materials supply as EUV lithography scales beyond current nodes

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🅹 9. Toppan Photomasks, Inc.

Headquarters: Tokyo, Japan (Global Operations)
Key Offering: Advanced Photomasks, EUV Mask-Related Components

Toppan Photomasks is one of the global leaders in photomask manufacturing and plays a directly complementary role in the EUV pellicle market. Because pellicles exist specifically to protect photomasks during lithography, the technical relationship between mask manufacturers and pellicle suppliers is intimate and interdependent. Toppan works closely with chipmakers to optimize photomask designs for EUV compatibility, and this work naturally encompasses pellicle integration requirements. The company operates advanced mask manufacturing facilities in Japan, the United States, and Europe, giving it a broad geographic footprint that mirrors the global distribution of EUV tool installations. Toppan’s involvement in EUV mask qualification programs makes it a critical node in the supply chain that pellicle manufacturers must align with closely.

Key Innovation Highlights:

• Advanced EUV photomask manufacturing capabilities across Japan, the U.S., and Europe

• Deep engagement in EUV mask qualification programs at leading-edge foundries

• Collaborative development with pellicle suppliers to optimize mask-pellicle integration

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🅺 10. Imec (Interuniversity Microelectronics Centre)

Headquarters: Leuven, Belgium
Key Offering: EUV Pellicle R&D, Semiconductor Process Research, Industry Collaboration

While imec is a research organization rather than a commercial manufacturer, its role in the EUV pellicle ecosystem is so significant that it warrants inclusion among the industry’s top influencers. Imec operates some of the world’s most advanced EUV research facilities and has been a central hub for pellicle technology development, most notably through its long-running collaboration with Canatu on CNT pellicle solutions. Chipmakers, equipment vendors, and materials companies worldwide rely on imec’s EUV research infrastructure to validate new pellicle designs before committing to commercial production investments. Imec’s published research consistently shapes the technical roadmap for the entire industry, and its partnerships with ASML, TSMC, Samsung, and Intel make it a genuine market shaper even without a direct commercial product.

Key Innovation Highlights:

• Central R&D partner for EUV pellicle validation, including CNT pellicle development with Canatu

• Operates advanced EUV lithography research tools accessible to global semiconductor leaders

• Published research shapes pellicle performance benchmarks and industry technology roadmaps

Get Full Report Here:
Semiconductor EUV Pellicles Market – View in Detailed Research Report

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🌎 Outlook: The Future of Semiconductor EUV Pellicles Is Thinner, Stronger, and Smarter

The semiconductor EUV pellicles market is undergoing a period of accelerating transformation. While silicon-based pellicles still account for the majority of commercial deployments, the industry is investing heavily in carbon nanotube and multi-layer material innovations, next-generation manufacturing processes, and supply chain diversification strategies that will redefine competitive dynamics over the coming years.

📈 Key Trends Shaping the Market:

• Rapid transition from single-layer polysilicon to multi-layer MoSi and CNT pellicle structures driving transmittance above 90%

• Growing demand from AI processor and HPC chip production accelerating EUV pellicle consumption across Asia-Pacific foundries

• Geopolitical pressures and export controls intensifying supplier qualification programs for alternative pellicle sources in South Korea and beyond

• High-NA EUV systems requiring next-generation pellicle performance benchmarks, creating new opportunities for specialized innovators

Get Full Report Here:
Semiconductor EUV Pellicles Market – View in Detailed Research Report

The companies profiled above are not only protecting photomasks—they’re spearheading the precision revolution that makes tomorrow’s most advanced semiconductors possible.