The Global CVD & ALD Precursor Market was valued at USD 2.18 Billion in 2024 and is projected to reach USD 3.53 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 8.1% during the forecast period (2024–2030). This robust growth is driven by the relentless demand for smaller, more powerful semiconductor nodes, the expansion of 3D NAND and DRAM memory, and the critical role of Atomic Layer Deposition (ALD) in manufacturing next-generation logic chips.

As the semiconductor industry pushes the boundaries of miniaturization and material science, the suppliers of high-purity chemical precursors for Chemical Vapor Deposition (CVD) and ALD processes are foundational to technological progress. In this blog, we profile the Top 10 Companies in the CVD & ALD Precursor Industry—a mix of global chemical giants and specialized material innovators that are shaping the future of electronics manufacturing.

Download FREE Sample Report:
Global CVD & ALD Precursor Market – View in Detailed Research Report

---

🔟 1. Merck KGaA (Versum Materials legacy)

Headquarters: Darmstadt, Germany
Key Offering: High-purity precursors for metal, dielectric, and semiconductor ALD/CVD

Merck, following its acquisition of Versum Materials, is a dominant force in the electronic materials space. The company offers an extensive portfolio of sophisticated precursors essential for depositing thin films in advanced semiconductor fabrication, including materials for high-k dielectrics, metal gates, and copper interconnects.

Innovation & Market Focus:

• Leading supplier for sub-7nm and 5nm logic node fabrication

• Strong R&D pipeline for precursors targeting Gate-All-Around (GAA) transistors and 3D DRAM

• Global production and purification facilities ensuring ultra-high purity standards

Download FREE Sample Report:
Global CVD & ALD Precursor Market – View in Detailed Research Report

---

9️⃣ 2. Air Liquide

Headquarters: Paris, France
Key Offering: ALD/CVD precursors, specialty gases, and advanced molecule delivery systems

Air Liquide’s Electronics division is a key enabler for the semiconductor industry, providing not only precursor chemicals but also integrated solutions for their safe and precise delivery into deposition chambers. Their expertise spans precursors for silicon, metal, and organic thin films.

Innovation & Market Focus:

• Development of liquid injection systems for low-vapor-pressure precursors

• Focus on sustainability with fluorine-based precursors for lower Global Warming Potential (GWP)

---

8️⃣ 3. DuPont de Nemours, Inc.

Headquarters: Wilmington, Delaware, USA
Key Offering: Interconnect metal precursors, low-k dielectric precursors

DuPont is a longstanding leader in specialty chemicals for the electronics sector. The company provides critical precursor materials used in the deposition of copper barriers/liners and low-k dielectric films, which are vital for reducing resistance and capacitance in advanced integrated circuits.

Innovation & Market Focus:

• Pioneering cobalt and ruthenium precursors for advanced interconnects

• Collaborative development with major semiconductor manufacturers

---

7️⃣ 4. ADEKA Corporation

Headquarters: Tokyo, Japan
Key Offering: High-purity metalorganic precursors for ALD and MOCVD

ADEKA is a prominent Japanese chemical company with a strong focus on high-performance materials for electronics. It is recognized for its high-purity metalorganic precursors, which are critical for depositing complex oxide films and III-V compound semiconductors used in memory and optoelectronic devices.

Innovation & Market Focus:

• Leading supplier of hafnium and zirconium precursors for high-k dielectrics

• Expansion of production capacity to meet growing demand from Asian semiconductor fabs

---

6️⃣ 5. Entegris, Inc.

Headquarters: Billerica, Massachusetts, USA
Key Offering: Precursor delivery systems, high-purity packaging, and select precursor chemicals

Entegris specializes in materials integrity management, playing a crucial role in the precursor supply chain. While not primarily a chemical synthesizer, the company provides the critical packaging, purification, and delivery systems that ensure precursor integrity from the bottle to the wafer, a vital service for leading-edge fabs.

Innovation & Market Focus:

• Advanced SDS (Safe Delivery Source) systems for hazardous precursors

• Acquisition of CMC Materials (now part of Entegris) expanded its precursor and slurry portfolio

---

5️⃣ 6. Soulbrain Co., Ltd.

Headquarters: Gyeonggi-do, South Korea
Key Offering: Wet chemicals, etchants, and high-purity ALD/CVD precursors

Soulbrain is a major South Korean supplier of high-purity chemicals to the semiconductor industry. The company has a significant market presence, particularly in the memory sector, supplying precursors for depositing critical layers in DRAM and 3D NAND flash memory structures.

Innovation & Market Focus:

• Strong partnerships with leading Korean memory manufacturers (Samsung, SK Hynix)

• Development of proprietary purification technologies for metallorganic precursors

---

4️⃣ 7. Hansol Chemical

Headquarters: Seoul, South Korea
Key Offering: Precursors for tungsten, titanium, and other metal films

Hansol Chemical is another key Korean player that supplies essential precursor materials to the domestic and global semiconductor industry. The company is known for its reliable supply of tungsten hexafluoride (WF6) and titanium tetrachloride (TiCl4), which are workhorse precursors for contact and barrier layers.

Innovation & Market Focus:

• Investment in capacity expansion for high-demand metal precursors

• Focus on reducing impurities to meet the stringent requirements of advanced nodes

---

3️⃣ 8. SK materials

Headquarters: Gyeonggi-do, South Korea
Key Offering: Ultra-high-purity specialty gases and fluoride-based precursors

SK materials is a leader in the production of ultra-high-purity gases and chemicals. The company supplies critical fluorine-based precursors like nitrogen trifluoride (NF3) for chamber cleaning and tungsten hexafluoride (WF6) for CVD processes, holding a significant global market share.

Innovation & Market Focus:

• Dominant position in the NF3 market, a key consumable for all CVD/ALD tools

• Vertical integration and advanced purification processes to ensure supreme quality

---

2️⃣ 9. Tanaka Precious Metals

Headquarters: Tokyo, Japan
Key Offering: Precursors based on precious metals (Ruthenium, Platinum, Iridium)

Tanaka is a global specialist in precious metals, and its electronics division provides high-purity precursors containing ruthenium, platinum, and other noble metals. These materials are essential for creating conductive electrodes in memory capacitors and as liner/barrier layers in interconnects.

Innovation & Market Focus:

• Expertise in synthesizing stable and volatile precious metal precursors

• Critical supplier for the development of next-generation Ferroelectric RAM (FeRAM) and MRAM

---

1️⃣ 10. DNF Co., Ltd.

Headquarters: Gyeonggi-do, South Korea
Key Offering: Specialized precursors for amorphous carbon layers (ACL) and hard masks

DNF has carved out a strong niche as a leading supplier of precursors for depositing amorphous carbon films. These films are used extensively as hard masks in the complex multi-patterning processes required for today’s most advanced semiconductor devices.

Innovation & Market Focus:

• Market leader in acetylene-based and other carbon-containing precursors

• Close collaboration with equipment makers and foundries to tailor materials for specific processes

Get Full Report Here:
Global CVD & ALD Precursor Market – View in Detailed Research Report

---

🌍 Outlook: The Future of CVD & ALD Precursors is Driven by Material Innovation

The CVD & ALD precursor market is at the heart of semiconductor advancement. As device architectures become more three-dimensional and complex, the demand for novel, high-performance precursor chemistries will intensify. The shift towards new channel materials and complex integration schemes like CFET (Complementary Field-Effect Transistor) will require unprecedented material innovation.

📈 Key Trends Shaping the Market:

• Development of precursors for 2D materials (e.g., MoS2) and ferroelectric Hafnium Zirconium Oxide (HZO)

• Increasing adoption of thermal and plasma-enhanced ALD for high-aspect-ratio structures in 3D NAND

• Strategic partnerships between precursor suppliers, OEMs, and IDMs to co-develop bespoke materials

• Growing focus on supply chain resilience and geographic diversification of production

Get Full Report Here:
Global CVD & ALD Precursor Market – View in Detailed Research Report

The companies listed above are not only supplying essential materials—they are enabling the next wave of digital transformation by providing the building blocks for smarter, faster, and more efficient electronics.