The Global CMP Slurry for Semiconductor Market was valued at USD 1.86 Billion in 2024 and is projected to reach USD 2.65 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 6.1% during the forecast period (2024–2030). This sustained growth is fueled by the relentless demand for advanced semiconductor nodes, the expansion of global foundry capacity, and the critical role CMP slurry plays in enabling the fabrication of sub-7nm logic and high-bandwidth memory (HBM) chips.

As the semiconductor industry pushes the boundaries of Moore’s Law, achieving atomic-level surface planarity is paramount. The spotlight is on the key chemical suppliers who are driving innovation in formulation, particle stability, and selectivity. In this blog, we profile the Top 10 Companies in the CMP Slurry Industry—a mix of global chemical giants and specialized manufacturers shaping the future of chip manufacturing.

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🔟 1. CMC Materials (Now Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: iDiel, iCue, and other advanced CMP slurries for various applications

Following its acquisition by Entegris, CMC Materials remains a dominant force in the CMP consumables market. The company provides a comprehensive portfolio of high-performance slurries for tungsten, copper, oxide, and advanced barrier polishing, serving all major semiconductor manufacturers worldwide.

Innovation & Market Focus:

• Leading supplier for advanced logic nodes (5nm, 3nm and beyond)
• Strong R&D focus on low-defect, high-selectivity slurries
• Integrated solutions combining slurries, pads, and filtration

Download FREE Sample Report: CMP Slurry for Semiconductor Market – View in Detailed Research Report

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9️⃣ 2. DuPont (Formerly Dow Chemical Electronic Materials)

Headquarters: Wilmington, Delaware, USA
Key Offering: Optiplane slurries for oxide, tungsten, copper, and STI

DuPont’s Electronic & Imaging segment is a key innovator in CMP technologies. Their Optiplane slurries are engineered for high removal rates and exceptional planarization efficiency, critical for 3D NAND flash memory and leading-edge logic devices.

Innovation & Market Focus:

• Specialization in slurries for memory and advanced logic applications
• Development of ceria-based slurries for shallow trench isolation (STI)
• Global manufacturing and technical support footprint

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8️⃣ 3. Fujimi Corporation

Headquarters: Aichi Prefecture, Japan
Key Offering: Glanz series slurries for silicon, oxide, and metal CMP

Fujimi Corporation is a leading global abrasive manufacturer with a strong focus on the semiconductor industry. The company’s Glanz series of CMP slurries, based on high-purity colloidal silica and ceria, are known for their consistent quality and performance.

Innovation & Market Focus:

• Expertise in colloidal silica and ceria slurry formulations
• Significant market share in the Asia-Pacific region
• Strategic partnerships with Japanese and Korean semiconductor giants

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7️⃣ 4. Merck KGaA (Versum Materials)

Headquarters: Darmstadt, Germany
Key Offering: CMP slurries for interlayer dielectric (ILD), tungsten, and copper

Merck KGaA, through its acquisition of Versum Materials, boasts a formidable portfolio of semiconductor process materials. Their CMP slurry division delivers solutions tailored for the precise planarization requirements of complex multi-patterning processes used in advanced chipmaking.

Innovation & Market Focus:

• Focus on enabling EUV lithography through superior planarization
• Development of next-generation slurries for novel materials like cobalt and ruthenium
• Strong presence in the European and North American markets

Download FREE Sample Report: CMP Slurry for Semiconductor Market – View in Detailed Research Report

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6️⃣ 5. Fujifilm

Headquarters: Tokyo, Japan
Key Offering: CMP slurries for silicon wafer, oxide, and metal polishing

Fujifilm’s Electronic Materials business leverages its deep expertise in chemical formulation and nanotechnology to produce high-performance CMP slurries. The company is particularly strong in slurries for silicon wafer manufacturing and oxide CMP.

Innovation & Market Focus:

• Advanced slurries for silicon carbide (SiC) and gallium nitride (GaN) substrates
• Focus on reducing defects and improving wafer yield
• Expansion of production capacity to meet growing demand

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5️⃣ 6. Showa Denko Materials (Hitachi Chemical)

Headquarters: Tokyo, Japan
Key Offering: CMP slurries for a wide range of semiconductor applications

As part of the Showa Denko Group, this company (formerly Hitachi Chemical) is a major supplier of semiconductor materials. It offers a diverse line of CMP slurries, with a strong emphasis on research and development to keep pace with evolving industry needs.

Innovation & Market Focus:

• Broad portfolio covering both mainstream and advanced applications
• Investment in R&D for slurries suitable for next-generation devices
• Established, long-term relationships with IDMs and foundries

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4️⃣ 7. Saint-Gobain

Headquarters: Courbevoie, France
Key Offering: High-purity abrasive grains and slurry formulations

Saint-Gobain, a world leader in materials, provides high-performance abrasive solutions for the semiconductor industry. Their expertise in engineered ceramics and precise particle technology underpins their offerings in the CMP slurry supply chain.

Innovation & Market Focus:

• Supplier of key raw materials and customized slurry formulations
• Focus on slurry stability and consistency for high-volume manufacturing
• Global reach with local technical support capabilities

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3️⃣ 8. AGC Inc.

Headquarters: Tokyo, Japan
Key Offering: Colloidal silica and ceria-based CMP slurries

AGC Inc. utilizes its strong chemical manufacturing base to produce high-quality CMP slurries. The company is a significant player, particularly in the supply of key slurry components and finished products for various polishing steps.

Innovation & Market Focus:

• Strong capabilities in colloidal silica dispersion technology
• Development of environmentally friendly slurry formulations
• Strategic focus on the growing Asian semiconductor market

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2️⃣ 9. Ace Nanochem Co., Ltd.

Headquarters: Gyeonggi-do, South Korea
Key Offering: Specialized CMP slurries for memory and foundry applications

Ace Nanochem is a prominent South Korean company specializing in nanometer-sized chemical mechanical polishing agents. It has carved out a significant niche, particularly in serving the dense semiconductor manufacturing hub of South Korea.

Innovation & Market Focus:

• Proximity and strong ties to major Korean memory and foundry players
• Agile R&D focused on custom solutions for specific customer challenges
• Growing presence in the global supply chain

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1️⃣ 10. Ferro Corporation (UWiZ Technology)

Headquarters: Cleveland, Ohio, USA (Acquired by Prince International Corporation)
Key Offering: CMP slurries for oxide, metal, and substrate polishing

Ferro’s Electronic Materials group, with technology from its UWiZ acquisition, is a notable supplier of CMP slurries. The company focuses on developing slurries that offer high planarization efficiency and low defectivity for a range of semiconductor applications.

Innovation & Market Focus:

• Expertise in both fumed and colloidal silica-based slurries
• Solutions for packaging and compound semiconductor applications
• Commitment to expanding its product portfolio for advanced nodes

Get Full Report Here: CMP Slurry for Semiconductor Market – View in Detailed Research Report

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🌍 Outlook: The Future of CMP Slurry Is Smarter and More Selective

The CMP slurry market is undergoing a significant transformation. As chip architectures become more three-dimensional and incorporate novel materials, the demand for highly specialized, application-specific slurries is intensifying. The industry is investing heavily in R&D for next-generation formulations, collaborative development with chipmakers, and sustainable manufacturing practices.

📈 Key Trends Shaping the Market:

• R&D focus on slurries for sub-3nm nodes, GAA transistors, and advanced packaging.
• Growing demand for high-selectivity slurries to polish complex material stacks without damage.
• Increasing importance of slurry recycling and waste reduction for cost and environmental sustainability.
• Consolidation and strategic partnerships among material suppliers to offer integrated CMP solutions.

Get Full Report Here: CMP Slurry for Semiconductor Market – View in Detailed Research Report

The companies listed above are not only supplying essential chemicals—they are enabling the continued scaling and innovation of the global semiconductor industry.