The Global Semiconductor CMP Polishing Slurry Market was valued at USD 2.7 Billion in 2024 and is projected to reach USD 4.1 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 6.8% during the forecast period (2024–2030). This robust growth is fueled by the relentless demand for advanced semiconductor nodes, the expansion of the electronics and automotive sectors, and the critical role of Chemical Mechanical Planarization (CMP) in fabricating high-performance integrated circuits.
As semiconductor device geometries shrink to 3nm and below, the precision and performance of CMP slurries have become paramount. These specialized colloidal suspensions are essential for achieving the ultra-flat, defect-free surfaces required for multi-layer chip architectures. In this blog, we profile the Top 10 Companies in the Semiconductor CMP Polishing Slurry Industry—a group of chemical specialists and material science leaders driving innovation at the nanoscale.
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🔟 1. Cabot Microelectronics Corporation
Headquarters: Aurora, Illinois, USA
Key Offering: iCue® Intelligent Dispensing Technology, Epi-Sil™ Silicon Slurries, Oxidic and Metallic Slurries
Cabot Microelectronics is a global leader in CMP slurries, holding a significant market share. The company provides a comprehensive portfolio of high-performance slurries for tungsten, copper, silicon dioxide, and advanced node applications, serving every major semiconductor fabricator worldwide.
Innovation Initiatives:
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Development of slurries for sub-5nm logic and advanced 3D NAND memory
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Investment in R&D for next-generation materials like Cobalt and Ruthenium
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Sustainable manufacturing processes and recycling technologies
9️⃣ 2. Fujimi Corporation
Headquarters: Aichi Prefecture, Japan
Key Offering: Glanzox Silica Slurries, Semisperse® Abrasives, Specialty Cerium Oxide Slurries
Fujimi Corporation is a premier Japanese manufacturer of high-precision polishing abrasives and slurries. The company is renowned for its high-purity colloidal silica products, which are critical for STI (Shallow Trench Isolation) and ILD (Interlayer Dielectric) CMP processes.
Innovation Initiatives:
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Pioneering cerium oxide-based slurries for sophisticated oxide polishing
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Expansion of production capacity to meet global demand surges
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8️⃣ 3. Hitachi Chemical (now part of Showa Denko Materials)
Headquarters: Tokyo, Japan
Key Offering: PLANERLITE® Series Slurries for Cu, W, SiO2, Poly-Si
Hitachi Chemical, now integrated into Showa Denko Materials, has a long-standing reputation for high-quality CMP materials. Its PLANERLITE slurries are engineered for low defects and high planarization efficiency, making them a trusted choice for memory and logic chip manufacturers.
Innovation Initiatives:
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Focus on low-defect, high-selectivity slurries for complex 3D structures
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Integration of materials science expertise post-Showa Denko merger
7️⃣ 4. Versum Materials (now part of Merck KGaA)
Headquarters: Tempe, Arizona, USA (Global operations under Merck)
Key Offering: CMP Slurries for metal and dielectric polishing, Klebosol® Colloidal Silica
Versum Materials, now a crucial part of Merck’s Electronics business, offers advanced CMP slurry solutions. Their products are designed for leading-edge semiconductor manufacturing, with a strong focus on performance and consistency for the most challenging applications.
Innovation Initiatives:
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Leveraging Merck’s global R&D network for next-gen slurry development
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Specialization in slurries for cobalt interconnect and MRAM applications
6️⃣ 5. DuPont de Nemours, Inc.
Headquarters: Wilmington, Delaware, USA
Key Offering: DuPont™ CMP Slurries, EKC Technology™ post-CMP cleaners
DuPont brings its extensive material science expertise to the CMP slurry market. The company provides innovative slurry systems complemented by its best-in-class post-CMP cleaning solutions, offering a complete planarization package to its customers.
Innovation Initiatives:
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Development of integrated CMP and cleaning solutions to reduce process steps
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R&D into novel abrasive particles and chemical formulations
5️⃣ 6. AGC Inc.
Headquarters: Tokyo, Japan
Key Offering: Colloidal Silica Slurries, Ceria-based Slurries for STI
AGC is a global glass and chemicals giant with a strong presence in high-performance CMP slurries. The company’s expertise in fluorine and silica chemistry allows it to produce highly stable and effective slurries for a wide range of semiconductor applications.
Innovation Initiatives:
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Expansion of high-selectivity ceria slurries for advanced memory devices
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Investment in sustainability, including water recycling in slurry manufacturing
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Semiconductor CMP Polishing Slurry Market – View in Detailed Research Report
4️⃣ 7. Anji Microelectronics Technology (Shanghai) Co., Ltd.
Headquarters: Shanghai, China
Key Offering: Full range of CMP slurries for 8-inch and 12-inch wafers
Anji Microelectronics is a leading Chinese supplier dedicated to the research and production of CMP slurries. The company plays a vital role in the regional supply chain, supporting China’s growing semiconductor industry with localized, high-quality products.
Innovation Initiatives:
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Strong focus on import substitution and supply chain security within China
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Continuous R&D to match the performance of international competitors
3️⃣ 8. ACE Nanochem (Shenyang) Co., Ltd.
Headquarters: Shenyang, China
Key Offering: Silica, Ceria, and Alumina-based CMP Slurries
ACE Nanochem is another key Chinese player, specializing in nano-abrasives and CMP slurry formulations. The company serves both domestic and international markets, providing cost-effective and reliable solutions for various polishing steps.
Innovation Initiatives:
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Development of specialized slurries for compound semiconductors (SiC, GaN)
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Expansion of product portfolio to cover more advanced applications
2️⃣ 9. Fujifilm Holdings Corporation
Headquarters: Tokyo, Japan
Key Offering: CMP slurries for Cu/Low-k, STI, and ILD applications
Leveraging its deep expertise in fine chemicals and nanotechnology, Fujifilm has developed a respectable position in the CMP slurry market. The company focuses on creating slurries that enable higher yields and lower cost-of-ownership for chipmakers.
Innovation Initiatives:
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Application of proprietary nanoparticle technology to slurry design
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Collaboration with semiconductor equipment manufacturers for process optimization
1️⃣ 10. CMC Materials, Inc. (now part of Entegris, Inc.)
Headquarters: Aurora, Illinois, USA (as part of Entegris)
Key Offering: Advanced CMP slurries, pads, and engineered materials
CMC Materials, now fully integrated into Entegris, was a pure-play provider of advanced CMP slurries. The merger created a materials integrity management powerhouse, offering a comprehensive suite of products that control contamination and improve yields throughout the semiconductor manufacturing process.
Innovation Initiatives:
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Synergistic product development with Entegris’s filtration and handling solutions
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Leading R&D in slurries for emerging materials and architectures
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Semiconductor CMP Polishing Slurry Market – View in Detailed Research Report
🌍 Outlook: The Future of Semiconductor CMP Slurry is Smarter and More Specialized
The semiconductor CMP polishing slurry market is undergoing a significant transformation. As chip manufacturers push the boundaries of physics, slurry suppliers must innovate to provide solutions that are not only more effective but also more intelligent and sustainable.
📈 Key Trends Shaping the Market:
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Advanced Node Progression: Development of slurries for 2nm, GAA (Gate-All-Around) transistors, and beyond, requiring unparalleled precision.
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New Material Integration: Tailored slurries for novel materials like Cobalt interconnects, Ruthenium, and high-mobility channels.
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Supply Chain Resilience: Geographic diversification of manufacturing and increased regional self-sufficiency, particularly in Asia and the US.
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Sustainability Focus:
Development of eco-friendly formulations, recycling of slurry waste streams, and reduction of water usage in manufacturing processes.
The companies listed above are not just suppliers; they are enablers of technological progress. Their relentless innovation in slurry chemistry ensures that the semiconductor industry can continue its path toward smaller, faster, and more powerful chips that drive the global digital economy.
Get Full Report Here:
Semiconductor CMP Polishing Slurry Market – View in Detailed Research Report
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