The Global Post Etch Residue (PER) Cleaning Solutions Market was valued at USD 458.2 Million in 2024 and is projected to reach USD 642.8 Million by 2030, growing at a Compound Annual Growth Rate (CAGR) of 5.8% during the forecast period (2024–2030). This growth is being driven by the relentless expansion of the semiconductor industry, the transition to more complex sub-5nm process nodes, and the increasing adoption of advanced packaging technologies that demand pristine wafer surfaces free from contamination.

As semiconductor device geometries shrink to atomic scales, the challenge of completely removing the complex polymeric and inorganic residues left behind by plasma etching processes becomes paramount. The effectiveness of PER cleaning directly impacts device yield, performance, and reliability. In this blog, we profile the Top 10 Companies in the Post Etch Residue (PER) Cleaning Solutions Industry—a group of specialty chemical giants and material science innovators that are essential to the fabrication of next-generation chips.

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🔟 1. Entegris, Inc.

Headquarters: Billerica, Massachusetts, USA
Key Offering: EKC™ PER Cleaning Chemistry, OptiGrade™ formulations

Entegris is a global leader in specialty chemicals for microcontamination control, with its EKC brand being one of the most recognized names in PER removal. The company provides highly selective formulations designed to remove residues from advanced logic, memory, and compound semiconductor applications without damaging delicate device structures.

Innovation Focus:

• Development of low-copper corrosion and low-k dielectric compatible chemistries

• Integration of purification systems for ultra-high-purity chemicals

• Advanced formulations for 3D NAND and EUV lithography patterning residues

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9️⃣ 2. DuPont de Nemours, Inc.

Headquarters: Wilmington, Delaware, USA
Key Offering: DuPont™ EKC PER Cleaning Solutions, Chelating Agents

DuPont’s Electronics & Industrial segment offers a comprehensive portfolio of PER cleaners, leveraging decades of expertise in material science. Their solutions are engineered for high selectivity and are critical in the manufacturing of leading-edge semiconductors, particularly for post-via-etch and post-metal-etch applications.

Innovation Focus:

• Sustainable chemistry initiatives with reduced environmental impact

• R&D focused on next-generation etch processes for Gate-All-Around (GAA) transistors

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8️⃣ 3. Versum Materials, Inc. (Merck KGaA)

Headquarters: Tempe, Arizona, USA (Part of Merck’s Electronics business)
Key Offering: Versum™ PER Strippers, Selectively formulated cleaners

Now fully integrated into Merck KGaA, Darmstadt, Germany, the former Versum Materials brings a powerful portfolio of deposition and removal chemistries. Their PER cleaning solutions are known for high-performance removal of complex residues from high-aspect-ratio structures, a critical capability for 3D NAND and DRAM manufacturing.

Innovation Focus:

• Solutions tailored for complex multi-patterning schemes (SAQP, LELE)

• Global supply chain integration post-Merck acquisition

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Post Etch Residue (PER) Cleaning Solutions Market – View in Detailed Research Report

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7️⃣ 4. Mitsubishi Gas Chemical Company, Inc.

Headquarters: Tokyo, Japan
Key Offering: MGC PER Removers, Aqueous and Semi-aqueous formulations

Mitsubishi Gas Chemical is a major Japanese supplier of high-purity chemicals for the electronics industry. The company offers a range of aqueous and semi-aqueous PER removers that are widely used in fabs across Asia. Their strength lies in providing reliable, cost-effective solutions for a broad spectrum of etching applications.

Innovation Focus:

• Focus on reducing particle generation and metallic impurities

• Expansion of product lines for advanced packaging and MEMS applications

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6️⃣ 5. Fujifilm Corporation

Headquarters: Tokyo, Japan
Key Offering: Fujifilm PER Cleaning Solutions, CMP Slurries and Cleaners

Fujifilm’s Electronic Materials business has expanded significantly into the cleaning chemistry space. Leveraging its deep knowledge of surface science, the company develops PER cleaners that effectively address the residues from new etchants and hardmask materials used in advanced node processing.

Innovation Focus:

• Synergy between CMP slurries and post-CMP/etch cleaning technologies

• Development of environmentally friendly, halogen-free formulations

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5️⃣ 6. Avantor, Inc.

Headquarters: Radnor, Pennsylvania, USA
Key Offering: J.T.Baker® PER Cleaning Chemicals, High-Purity Solvents

Avantor is a leading global provider of ultra-high-purity materials and solutions for the life sciences and advanced technology industries. Their J.T.Baker brand offers a range of proven PER cleaning chemistries, supported by a robust global distribution and technical support network that serves semiconductor fabs worldwide.

Innovation Focus:

• Supply chain reliability and consistency for high-volume manufacturing

• Investment in purification technologies to meet stringent purity specs

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4️⃣ 7. Solexir

Headquarters: Seongnam-si, Gyeonggi-do, South Korea
Key Offering: Specialty PER Removers for Memory and Foundry

Solexir is a key South Korean player specializing in high-purity chemicals for the semiconductor and display industries. With a strong presence in the major semiconductor manufacturing hub of South Korea, Solexir develops tailored PER cleaning solutions that meet the specific requirements of leading memory and foundry customers.

Innovation Focus:

• Close collaboration with leading Asian semiconductor manufacturers

• Rapid development of custom formulations for new integration schemes

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3️⃣ 8. Technic Inc.

Headquarters: Providence, Rhode Island, USA
Key Offering: Technic PER Strippers, Electroplating and Etching Chemistry

Technic is a well-established supplier to the semiconductor industry, with expertise spanning plating, etching, and cleaning chemistries. Their PER cleaning solutions are often integrated with their other process chemical offerings, providing a unified approach to wafer-level surface preparation and finishing.

Innovation Focus:

• Leveraging cross-technology expertise from plating and etching divisions

• Focus on cost-performance optimization for mature and advanced nodes

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2️⃣ 9. AP&R Co., Ltd.

Headquarters: Hwaseong-si, Gyeonggi-do, South Korea
Key Offering: Specialty wet chemicals for semiconductor processes

AP&R is another significant South Korean chemical company that has carved out a strong position in the domestic semiconductor market. They provide a variety of wet process chemicals, including effective PER removers that are qualified for use in the world’s most advanced semiconductor fabrication facilities.

Innovation Focus:

• Strategically located production facilities near major Korean fabs

• Emphasis on quality control and batch-to-batch consistency

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1️⃣ 10. Kanto Chemical Co., Inc.

Headquarters: Chuo-ku, Tokyo, Japan
Key Offering: Kanto Kagaku PER Cleaning Solutions, Ultra-Pure Reagents

Kanto Chemical is a leading Japanese supplier of high-purity chemicals and reagents. The company has a long history of serving the electronics industry and offers a reliable portfolio of PER cleaning agents. Their strength lies in their comprehensive quality assurance protocols and extensive product catalog for various semiconductor manufacturing steps.

Innovation Focus:

• Development of low-global-warming-potential (GWP) solvent alternatives

• Expansion of high-purity chemical production capacity

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Post Etch Residue (PER) Cleaning Solutions Market – View in Detailed Research Report

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🔬 Outlook: The Future of PER Cleaning Is Precision and Sustainability

The Post Etch Residue cleaning market is undergoing a fundamental transformation. As semiconductor architectures become increasingly three-dimensional and material stacks grow more complex, the demand for highly selective, material-friendly cleaning chemistries is accelerating. The industry is moving beyond one-size-fits-all solutions toward customized formulations for specific integration schemes.

📈 Key Trends Shaping the Market:

• Rising complexity of residues from new etch chemistries (e.g., atomic layer etching)

• Increased focus on sustainability, driving demand for aqueous and semi-aqueous removers with lower environmental impact

• Integration of cleaning and surface preparation steps into single-wafer processing tools

• Growing importance of PER cleaning in advanced packaging, particularly for hybrid bonding applications

Get Full Report Here:
Post Etch Residue (PER) Cleaning Solutions Market – View in Detailed Research Report

The companies profiled above are not just supplying essential chemicals—they are enabling the continued scaling of semiconductor technology by solving one of the industry’s most persistent and critical challenges: achieving perfect surface cleanliness at the atomic scale.