The Global Metal Chemical Mechanical Polishing (CMP) Slurry Market was valued at USD 3.21 Billion in 2024 and is projected to reach USD 4.98 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 7.6% during the forecast period (2024–2030). This robust growth is propelled by the relentless advancement in semiconductor technology nodes, the proliferation of 3D NAND and DRAM memory chips, and the increasing demand for ultra-flat surfaces in advanced packaging and optoelectronics.

As the semiconductor industry pushes the boundaries of miniaturization and performance, the precision of the CMP process becomes paramount. In this blog, we profile the Top 10 Companies in the Metal Chemical Mechanical Polishing (CMP) Slurry Industry—a group of specialized chemical suppliers and material science innovators who are enabling the fabrication of next-generation electronic devices.

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🔟 1. CMC Materials (Now Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: iDiel, iCue, Klebosol CMP Slurries for Tungsten, Copper, Silicon Dioxide

Following its acquisition by Entegris, CMC Materials remains a dominant force in the CMP slurry market. The company provides high-performance slurries tailored for the most advanced logic and memory semiconductor applications, with a strong focus on defect reduction and planarization efficiency.

Innovation Initiatives:

• Development of novel abrasive particles for sub-5nm node manufacturing
• Expansion of product portfolio for silicon carbide (SiC) and gallium nitride (GaN) polishing
• Integration with Entegris’s broader portfolio for comprehensive contamination control solutions

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9️⃣ 2. Cabot Microelectronics (a part of CMC Materials/Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: Semi-Sperse, Epi-Pro, Duraplane CMP Slurries

Cabot Microelectronics, now fully integrated into the CMC Materials/Entegris entity, has been a pioneer in CMP technology. It holds a significant market share, particularly in slurries for copper interconnect and shallow trench isolation (STI) processes, which are critical for high-performance computing chips.

Innovation Initiatives:

• Leadership in copper barrier slurries for advanced interconnect schemes
• R&D focused on low-downforce polishing for fragile structures
• Sustainability programs targeting slurry recycling and waste reduction

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8️⃣ 3. Fujimi Incorporated

Headquarters: Aichi, Japan
Key Offering: GLANZOX, SEMI-SPACE CMP Slurries for Silicon, SiO2, SiC

Fujimi Incorporated is a leading global manufacturer of precision abrasives and CMP slurries. The company is renowned for its high-purity cerium oxide and colloidal silica slurries, which are essential for polishing silicon wafers, optical components, and compound semiconductors.

Innovation Initiatives:

• Advanced slurries for hard-to-polish materials like silicon carbide (SiC)
• Expansion in the Asia-Pacific market to serve leading foundries and memory makers
• Development of environmentally friendly abrasive formulations

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7️⃣ 4. Hitachi Chemical (Showa Denko Materials)

Headquarters: Tokyo, Japan
Key Offering: HSC Series Slurries for Copper, Tungsten, and Dielectrics

Operating now under Showa Denko Materials following a merger, Hitachi Chemical has a long-standing reputation for high-quality electronic materials. Its CMP slurries are critical for achieving the surface planarity required in multilayer device structures for logic and memory applications.

Innovation Initiatives:

• Focus on slurries for 3D NAND flash memory fabrication
• Development of low-defect, high-selectivity formulations
• Strong partnerships with major Japanese and Korean semiconductor manufacturers

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Metal Chemical Mechanical Polishing (CMP) Slurry Market – View in Detailed Research Report

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6️⃣ 5. Versum Materials (Now part of Merck KGaA)

Headquarters: Tempe, Arizona, USA (Parent: Darmstadt, Germany)
Key Offering: CMP Slurries for Tungsten, Copper, Aluminum, and Dielectrics

Integrated into Merck’s Electronics business, Versum Materials brings a strong portfolio of CMP slurries and delivery systems. Merck’s extensive R&D capabilities are driving innovation in slurry chemistry to meet the demands of increasingly complex semiconductor architectures.

Innovation Initiatives:

• Investment in next-generation slurry technologies for sub-3nm nodes
• Integrated materials solutions combining slurries with pads and conditioners
• Global technical support network for leading-edge fabs

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5️⃣ 6. ACE Nanochem (A member of the ACE Technologies Group)

Headquarters: Gyeonggi-do, South Korea
Key Offering: Colloidal Silica and Ceria-based CMP Slurries

ACE Nanochem is a key player in the Asian CMP slurry market, supplying major semiconductor manufacturers in South Korea and Taiwan. The company specializes in high-performance colloidal silica slurries used in oxide polishing and silicon wafer finishing.

Innovation Initiatives:

• Localized production to ensure supply chain stability for key customers
• Development of customized slurry formulations for specific fab requirements
• Focus on cost-effective solutions without compromising on performance

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4️⃣ 7. Saint-Gobain

Headquarters: Courbevoie, France
Key Offering: High-Purity Abrasives, Zirconia, Alumina for CMP Slurries

Saint-Gobain, a global leader in materials, provides high-purity abrasive grains that are fundamental components of CMP slurries. While not always a finished slurry formulator, its materials are essential for many slurry manufacturers, making it a critical player in the supply chain.

Innovation Initiatives:

• Production of ultra-pure, narrowly dispersed abrasive particles
• R&D into novel abrasive materials for next-generation applications
• Sustainability efforts in abrasive material manufacturing processes

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3️⃣ 8. Fujifilm

Headquarters: Tokyo, Japan
Key Offering: CMP Slurries for Semiconductors and Hard Disk Drives

Fujifilm leverages its deep expertise in chemical synthesis and nanotechnology to produce advanced CMP slurries. The company’s products are used in semiconductor manufacturing, particularly for polishing critical layers in memory and logic chips, as well as in the production of hard disk drive substrates.

Innovation Initiatives:

• Development of functional polymers and additives for enhanced slurry performance
• Expansion of its electronic materials division globally
• Focus on slurries for emerging materials in semiconductor fabrication

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2️⃣ 9. Anji Microelectronics

Headquarters: Shanghai, China
Key Offering: CMP Slurries for Silicon Wafers, Oxides, and Metals

Anji Microelectronics is a leading Chinese supplier of CMP slurries, playing a vital role in supporting the growth of China’s domestic semiconductor industry. The company provides a range of slurries aimed at reducing reliance on imports and securing the semiconductor supply chain within the region.

Innovation Initiatives:

• Significant investment in R&D to close the technology gap with international leaders
• Collaboration with Chinese semiconductor fabs and research institutions
• Expansion of production capacity to meet growing domestic demand

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1️⃣ 10. DA NanoMaterials (DuPont)

Headquarters: Newark, Delaware, USA
Key Offering: CMP Slurries for Interconnect, STI, and ILD Applications

As part of DuPont’s Electronics & Industrial segment, DA NanoMaterials offers a comprehensive portfolio of CMP slurries. DuPont’s strong position in materials science enables the development of innovative slurry chemistries that address key challenges in selectivity, removal rate, and defectivity.

Innovation Initiatives:

• Advanced formulations for cobalt and ruthenium polishing in interconnects
• Development of eco-friendly and safer-to-use slurry products
• Global application engineering support for semiconductor manufacturers

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Metal Chemical Mechanical Polishing (CMP) Slurry Market – View in Detailed Research Report

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🔬 Outlook: The Future of Metal CMP Slurry Is Smarter and More Specialized

The Metal CMP Slurry market is at a critical inflection point. As semiconductor device structures evolve from 2D to 3D architectures and incorporate new materials, slurry formulations must become increasingly sophisticated and application-specific.

📈 Key Trends Shaping the Market:

• Development of slurries for new conductive materials like cobalt, ruthenium, and molybdenum
• Increasing demand for high-selectivity slurries in complex 3D NAND and DRAM structures
• Integration of CMP consumables (slurries, pads, conditioners) for optimized process performance
• Growing emphasis on slurry sustainability, including recycling and waste minimization technologies

The companies listed above are not only supplying essential materials for today’s chips—they are actively developing the enabling technologies for the future of computing, from AI hardware to quantum devices.

Get Full Report Here:
Metal Chemical Mechanical Polishing (CMP) Slurry Market – View in Detailed Research Report