The Global Copper CMP Polishing Slurry Market was valued at USD 1.54 Billion in 2024 and is projected to reach USD 2.25 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 6.5% during the forecast period (2024–2030). This robust growth is propelled by the relentless demand for advanced semiconductor devices, the miniaturization of integrated circuits, and the transition to next-generation technology nodes below 7nm.

As semiconductor fabrication becomes increasingly complex, the critical role of Chemical Mechanical Planarization (CMP) slurries in achieving flawless surface planarization is more pronounced than ever. In this blog, we profile the Top 10 Companies in the Copper CMP Polishing Slurry Industry—a group of specialized material science innovators and chemical giants enabling the future of electronics.

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🔟 1. CMC Materials (now Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: iDiel®, iCue®, Advanced Copper CMP Slurries

Following its acquisition by Entegris, CMC Materials remains a dominant force in the CMP slurry market. The company provides high-performance slurries essential for copper damascene processes in leading-edge logic and memory chips. Their products are known for excellent planarization efficiency and low defectivity.

Innovation & Growth Initiatives:

• Development of slurries for sub-5nm nodes and 3D NAND architectures

• Integration with Entegris’ broader portfolio of contamination control solutions

• Strategic R&D focused on reducing wafer-level defects

Download FREE Sample Report: Copper CMP Polishing Slurry Market – View in Detailed Research Report

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9️⃣ 2. Cabot Microelectronics (a part of CMC Materials/Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: Epi-Series, Reflexion® Slurries

Cabot Microelectronics, now fully integrated into the CMC Materials/Entegris entity, has a long-standing reputation as a pioneer in CMP technology. Its slurries are used by every major semiconductor manufacturer globally, offering tailored solutions for various copper interconnect layers.

Innovation & Growth Initiatives:

• Legacy of innovation in slurry chemistry and abrasives

• Strong intellectual property portfolio in CMP formulations

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8️⃣ 3. Fujimi Corporation

Headquarters: Aichi, Japan
Key Offering: PLANERLITE® Series Copper Slurries

Fujimi Corporation is a leading global supplier of precision abrasives and CMP slurries. The company’s PLANERLITE® series is engineered for high removal rates and superior surface quality in copper polishing applications, serving foundries and IDMs worldwide.

Innovation & Growth Initiatives:

• Expansion of manufacturing capacity to meet growing demand

• Development of eco-friendly and low-consumption slurry formulations

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7️⃣ 4. Hitachi Chemical (Showa Denko Materials)

Headquarters: Tokyo, Japan
Key Offering: Copper CMP Slurries for Advanced Packaging

As part of Showa Denko Materials following a merger, Hitachi Chemical’s advanced materials division is a key supplier for the semiconductor industry. The company provides high-purity slurries critical for copper polishing in both front-end and advanced packaging applications.

Innovation & Growth Initiatives:

• Focus on slurries for fan-out wafer-level packaging (FO-WLP) and 2.5D/3D ICs

• Investment in R&D for next-generation semiconductor materials

Download FREE Sample Report: Copper CMP Polishing Slurry Market – View in Detailed Research Report

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6️⃣ 5. Versum Materials (now part of Merck KGaA)

Headquarters: Tempe, Arizona, USA (Merck KGaA: Darmstadt, Germany)
Key Offering: CMP Slurries under the Merck Electronics business

Versum Materials, integrated into Merck’s Performance Materials division, strengthens its position as a leading electronic materials provider. Merck offers a comprehensive suite of CMP slurries, including specialized formulations for copper interconnect planarization with high selectivity and low defects.

Innovation & Growth Initiatives:

• Leveraging Merck’s global R&D capabilities for slurry innovation

• Providing integrated materials solutions for semiconductor fabrication

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5️⃣ 6. Fujifilm

Headquarters: Tokyo, Japan
Key Offering: FSL Series Copper CMP Slurries

Fujifilm’s Electronic Materials business is a significant player in the CMP slurry market. The company utilizes its expertise in fine chemicals and nanotechnology to develop slurries that deliver exceptional planarization performance for copper interconnects in advanced logic and memory devices.

Innovation & Growth Initiatives:

• R&D focused on colloidal silica-based abrasives for lower defects

• Expansion of its electronic materials portfolio through strategic investments

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4️⃣ 7. AGC Inc.

Headquarters: Tokyo, Japan
Key Offering: Specialty Colloidal Silica for CMP Slurries

AGC is a global leader in glass, chemicals, and high-performance materials. The company is a key supplier of high-purity colloidal silica, a critical abrasive component in many copper CMP slurries. AGC works closely with slurry formulators to provide tailored abrasive solutions.

Innovation & Growth Initiatives:

• Development of ultra-pure and uniformly sized colloidal silica particles

• Focus on sustainability in chemical manufacturing processes

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3️⃣ 8. JSR Corporation

Headquarters: Tokyo, Japan
Key Offering: Copper CMP Slurries for Memory and Logic

JSR Corporation is a leading multinational company deeply involved in semiconductor materials, including photoresists and CMP slurries. Its copper CMP slurries are designed to meet the stringent requirements of the most advanced semiconductor manufacturing processes.

Innovation & Growth Initiatives:

• Strong focus on materials for EUV lithography and associated process steps

• Collaborative development with major semiconductor manufacturers

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2️⃣ 9. Saint-Gobain

Headquarters: Courbevoie, France
Key Offering: High-Purity Abrasives and Ceramic Materials

Through its various divisions, Saint-Gobain provides essential materials for the semiconductor industry. The company’s expertise in high-performance ceramics and abrasives makes it a valuable supplier to the CMP slurry value chain, contributing key components for slurry formulations.

Innovation & Growth Initiatives:

• Investment in advanced material science for next-generation applications

• Global supply chain capabilities to support semiconductor manufacturing hubs

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1️⃣ 10. BASF SE

Headquarters: Ludwigshafen, Germany
Key Offering: Comprehensive Portfolio of CMP Slurries

BASF’s Electronic Materials division is a major global supplier of CMP slurries. The company offers a wide range of slurries for various applications, including advanced copper polishing. BASF leverages its vast chemical expertise to develop innovative formulations that enhance semiconductor yield and performance.

Innovation & Growth Initiatives:

• Continuous development of slurries for smaller technology nodes

• Commitment to sustainable chemistry and reducing environmental impact

Get Full Report Here: Copper CMP Polishing Slurry Market – View in Detailed Research Report

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🔬 Outlook: The Future of Copper CMP Slurry is Precision and Sustainability

The Copper CMP Polishing Slurry market is at the forefront of semiconductor innovation. As chip architectures evolve toward angstrom-scale dimensions, slurry formulations must deliver unprecedented levels of precision, selectivity, and control.

📈 Key Trends Shaping the Market:

• Development of slurries for sub-3nm nodes and Gate-All-Around (GAA) transistors

• Increasing demand for slurries compatible with new interconnect metals like cobalt and ruthenium

• Growing emphasis on recycling and reusing CMP slurry waste streams

• R&D into “green” slurries with reduced environmental footprint

Get Full Report Here: Copper CMP Polishing Slurry Market – View in Detailed Research Report

The companies listed above are not only supplying critical materials—they are enabling the next wave of digital transformation by ensuring the manufacturability of ever-more-powerful and efficient semiconductors.