The Global High-k and CVD ALD Metal Precursor Market was valued at USD 1.2 Billion in 2024 and is projected to reach USD 2.1 Billion by 2030, growing at a Compound Annual Growth Rate (CAGR) of 8.5% during the forecast period (2024–2030). This robust growth is being propelled by the relentless scaling of semiconductor technology, the transition to advanced sub-5nm nodes, and the widespread adoption of 3D NAND and DRAM memory architectures that require highly specialized thin-film materials.

As the semiconductor industry pushes the boundaries of miniaturization and performance, the role of precursors has become critically important. These specialized chemicals are the essential building blocks for the ultra-thin, high-performance films that enable modern electronics. In this blog, we profile the Top 10 Companies in the High-k and CVD ALD Metal Precursor Market—a group of chemical giants and specialized innovators who are supplying the materials that power the digital age.

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🔟 1. Air Liquide

Headquarters: Paris, France
Key Offering: High-k Precursors (Hf, Zr), Metal Precursors (Ti, Ta, Co, Ru)

Air Liquide, through its Electronics division, is a global leader in the supply of advanced materials for semiconductor manufacturing. The company offers a comprehensive portfolio of precursors for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes, which are critical for gate oxides, capacitor dielectrics, and metal electrodes in logic and memory chips.

Innovation and R&D Initiatives:

• Development of next-generation precursors for sub-3nm node applications.

• Investment in sustainable manufacturing processes and circular economy principles for specialty gases and chemicals.

• Strategic collaborations with leading semiconductor manufacturers and equipment makers.

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9️⃣ 2. Merck KGaA

Headquarters: Darmstadt, Germany
Key Offering: High-k Precursors, Metalorganic Precursors, ALD/CVD Precursors for Interconnects

Merck’s Performance Materials business is a powerhouse in the electronic materials space. Following its acquisition of Versum Materials, the company has solidified its position as a top supplier of high-purity precursors. Their products are essential for depositing critical thin films in the most advanced semiconductor devices worldwide.

Innovation and R&D Initiatives:

• R&D focus on materials for EUV lithography and advanced patterning.

• Expansion of production capacity in Asia and the US to meet soaring demand.

• Pioneering work in liquid delivery systems for high-vapor-pressure precursors.

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8️⃣ 3. DNF Co., Ltd.

Headquarters: Daejeon, South Korea
Key Offering: Tungsten (W) Precursors, Cobalt (Co) Precursors, Titanium (Ti) Precursors

DNF is a leading South Korean specialty chemical company renowned for its high-quality metal-organic precursors. It is a key supplier to the major memory chip manufacturers and foundries, providing critical materials for word lines, bit lines, and capacitor electrodes in DRAM and 3D NAND flash memory.

Innovation and R&D Initiatives:

• Strong focus on developing precursors with high purity and excellent step coverage for high-aspect-ratio structures.

• Close technical partnerships with domestic and international semiconductor leaders.

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High-k and CVD ALD Metal Precursor Market – View in Detailed Research Report

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7️⃣ 4. Nanmat Technology Co., Ltd.

Headquarters: Suwon, South Korea
Key Offering: ALD/CVD Precursors for Metals and Metal Nitrides

Nanmat Technology is a specialized manufacturer of high-purity precursors for the semiconductor and display industries. The company has carved out a significant niche by providing reliable and high-performance materials that meet the stringent requirements of advanced semiconductor fabrication processes.

Innovation and R&D Initiatives:

• Specialization in precursors for barrier layers and seed layers in interconnects.

• Continuous investment in R&D to support the transition to smaller technology nodes.

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6️⃣ 5. Adeka Corporation

Headquarters: Tokyo, Japan
Key Offering: High-k Precursors (HfO2, ZrO2), SAM (Self-Assembled Monolayer) Materials

Adeka is a leading Japanese chemical company with a strong presence in the electronic materials market. The company’s high-k precursors are used for gate dielectrics in logic transistors, while its SAM materials are critical for area-selective deposition, an emerging technique to enable further device scaling.

Innovation and R&D Initiatives:

• Leading research in area-selective ALD, a key enabling technology for future nodes.

• Development of novel precursors with low impurity levels and high thermal stability.

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5️⃣ 6. Entegris, Inc.

Headquarters: Billerica, Massachusetts, USA
Key Offering: High-purity Precursors, SOD (Spin-On Dielectric) Materials, Delivery Systems

Entegris is a dominant supplier of mission-critical materials and materials handling solutions to the semiconductor industry. Its acquisition of CMC Materials significantly expanded its portfolio of high-performance precursor materials and planarization slurries, making it an integral partner for chipmakers.

Innovation and R&D Initiatives:

• Focus on integrated materials solutions that include purification, delivery, and handling.

• R&D into materials for advanced packaging and heterogeneous integration.

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4️⃣ 7. Strem Chemicals (Ascensus Specialties)

Headquarters: Newburyport, Massachusetts, USA
Key Offering: High-purity Metalorganic Compounds, Rare-earth Precursors, Custom Synthesis

Strem Chemicals is a leading manufacturer of high-purity, specialty chemicals for research and development, as well as production. The company provides a vast catalog of metalorganic precursors used by semiconductor companies for developing and prototyping new materials and processes.

Innovation and R&D Initiatives:

• Extensive catalog supporting R&D efforts for new semiconductor materials.

• Custom synthesis services for developing bespoke precursor molecules.

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3️⃣ 8. Tri Chemical Laboratories Inc.

Headquarters: Yamanashi, Japan
Key Offering: ALD/CVD Precursors for Ruthenium (Ru), Iridium (Ir), Platinum (Pt)

Tri Chemical Laboratories is a Japanese specialty chemical company focused on high-purity metalorganic precursors. It is recognized for its expertise in noble metal precursors, which are increasingly important for electrodes in high-performance memory capacitors and advanced interconnects.

Innovation and R&D Initiatives:

• Specialization in high-value noble and rare-earth metal precursors.

• Development of precursors with low resistivity and high conformity.

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High-k and CVD ALD Metal Precursor Market – View in Detailed Research Report

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2️⃣ 9. UP Chemical (Yoke Technology)

Headquarters: Hwaseong, South Korea
Key Offering: High-k Precursors, Silicon Precursors, Dopant Gases

UP Chemical, now part of Yoke Technology, is a major South Korean supplier of electronic specialty gases and precursors. The company plays a vital role in the regional supply chain, providing essential materials for the country’s world-leading memory and foundry sectors.

Innovation and R&D Initiatives:

• Strong focus on localizing the supply chain for critical semiconductor materials.

• Continuous improvement of precursor purity and production yield.

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1️⃣ 10. Soulbrain Co., Ltd.

Headquarters: Seongnam, South Korea
Key Offering: Wet Chemicals, Etchants, CVD/ALD Precursors

Soulbrain is a key Korean player in the semiconductor materials market, offering a wide range of high-purity chemicals. While known for its wet chemicals, the company has been expanding its footprint in the high-value precursor market, supplying materials for various deposition applications within fab processes.

Innovation and R&D Initiatives:

• Diversification from wet chemicals into high-growth precursor segments.

• Strategic investments to increase production capacity and technological capability.

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High-k and CVD ALD Metal Precursor Market – View in Detailed Research Report

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🔬 Outlook: The Future of High-k and CVD ALD Metal Precursors is Atomic-Level Precision

The High-k and CVD ALD Metal Precursor market is at the heart of semiconductor innovation. As device architectures become increasingly three-dimensional and complex, the demand for precursors that enable conformal, ultra-thin, and pure films will only intensify.

📈 Key Trends Shaping the Market:

• Transition to area-selective deposition techniques to enable single-digit nanometer patterning.

• Rising demand for noble metal precursors (Ru, Co) to replace traditional barriers and liners in interconnects, reducing resistance.

• Growing importance of precursors for 3D NAND and DRAM scaling, requiring materials for high-aspect-ratio structures.

• Increased R&D into new precursor chemistries for 2D materials and next-generation channel materials beyond silicon.

Get Full Report Here:
High-k and CVD ALD Metal Precursor Market – View in Detailed Research Report

The companies listed above are not only supplying critical chemicals—they are providing the fundamental materials for computational progress, enabling the next generation of AI, IoT, and high-performance computing.