The Global Tungsten CMP Slurry Market was valued at USD 248.7 Million in 2023 and is projected to reach USD 347.2 Million by 2030, growing at a Compound Annual Growth Rate (CAGR) of 4.9% during the forecast period (2024–2030). This growth is being driven by the relentless scaling of semiconductor technology nodes, increasing demand for memory and logic chips, and the accelerating adoption of advanced packaging solutions like 3D NAND and DRAM.

As the semiconductor industry pushes the boundaries of miniaturization and performance, the spotlight is on the key chemical suppliers who are driving innovation, precision, and material science breakthroughs. In this blog, we profile the Top 10 Companies in the Tungsten CMP Slurry Industry—specialty chemical leaders and material science pioneers shaping the future of global chip fabrication.

Download FREE Sample Report:
Tungsten CMP Slurry Market – View in Detailed Research Report

---

🔟 1. CMC Materials, Inc. (Now part of Entegris)

Headquarters: Aurora, Illinois, USA
Key Offering: iDiel®, iDura®, and iDyme® series of Tungsten CMP Slurries

CMC Materials, which was acquired by Entegris in 2022, is a dominant force in the CMP slurry market. Their tungsten slurries are engineered for exceptional planarization efficiency, low defectivity, and high selectivity, making them essential for advanced logic and memory device manufacturing at sub-10nm nodes.

Innovation Initiatives:

• Development of next-generation slurries for GAA (Gate-All-Around) transistors

• Focus on reducing tungsten dishing and erosion in complex interconnect structures

• Strong R&D collaborations with leading semiconductor foundries

---

9️⃣ 2. Fujifilm Holdings Corporation

Headquarters: Tokyo, Japan
Key Offering: GLANZ series of Tungsten CMP Slurries

Fujifilm is a major global supplier of CMP slurries, leveraging its deep expertise in chemical and materials science. Their GLANZ tungsten slurries are known for high removal rates and excellent surface uniformity, catering to both selective and non-selective CMP processes in NAND and DRAM production.

Innovation Initiatives:

• Expansion of slurry production capacity to meet rising global demand

• R&D focused on slurries for high-aspect-ratio TSV (Through-Silicon Via) applications

---

8️⃣ 3. Versum Materials (Part of Merck KGaA)

Headquarters: Tempe, Arizona, USA (Global HQ: Darmstadt, Germany)
Key Offering: Klebosol® and Capiderm™ series of CMP Slurries

Merck KGaA, through its Versum Materials business, is a leading electronic materials company. Their tungsten CMP slurries are critical for controlling critical dimension uniformity and minimizing defects in the most advanced semiconductor devices, with a strong presence in leading-edge foundry and memory fabs.

Innovation Initiatives:

• Investment in integrated CMP solutions combining slurries, pads, and conditioners

• Development of novel oxidizers and stabilizers for improved slurry performance

---

7️⃣ 4. DuPont de Nemours, Inc.

Headquarters: Wilmington, Delaware, USA
Key Offering: DuPont™ Tungsten CMP Slurries

DuPont is a cornerstone supplier to the semiconductor industry, offering a comprehensive portfolio of electronic materials. Their tungsten slurries are designed for high selectivity to underlying barrier layers and dielectrics, ensuring optimal device performance and yield in complex interconnect schemes.

Innovation Initiatives:

• Sustainable chemistry initiatives to reduce the environmental impact of CMP processes

• Tailored slurry formulations for 3D NAND and advanced DRAM architectures

Download FREE Sample Report:
Tungsten CMP Slurry Market – View in Detailed Research Report

---

6️⃣ 5. Fujimi Incorporated

Headquarters: Aichi, Japan
Key Offering: Planerlite® series of Tungsten CMP Slurries

Fujimi is a specialized abrasive and polishing material manufacturer with a significant focus on the semiconductor sector. Their Planerlite tungsten slurries are recognized for their high purity, consistent particle size distribution, and stability, which are crucial for defect-free wafer polishing.

Innovation Initiatives:

• Development of ceria and silica-based hybrid slurries for enhanced planarization

• Expansion of global technical support and customer service networks

---

5️⃣ 6. AGC Inc.

Headquarters: Tokyo, Japan
Key Offering: AGC Specialty CMP Slurries for Tungsten

AGC, a global materials giant, produces high-performance CMP slurries for various semiconductor applications. Their tungsten slurry offerings are engineered to meet the stringent requirements of advanced node fabrication, with a focus on achieving global and local planarity.

Innovation Initiatives:

• Leveraging expertise in glass and ceramic materials for novel abrasive technologies

• Collaborations with chemical manufacturers to develop proprietary additives

---

4️⃣ 7. Anjimirco Shanghai

Headquarters: Shanghai, China
Key Offering: Domestic Tungsten CMP Slurry Solutions

Anjimirco Shanghai is a key Chinese player in the CMP consumables market, focusing on the development and production of localized tungsten slurries. The company plays a vital role in supporting China’s growing semiconductor industry by providing cost-effective and reliable alternatives for mid-node and advanced packaging applications.

Innovation Initiatives:

• Focus on import substitution and strengthening the domestic semiconductor supply chain

• R&D aimed at improving slurry performance for mature and advanced nodes

---

3️⃣ 8. ACE NanoTek Corp.

Headquarters: Gyeonggi-do, South Korea
Key Offering: Specialty Nano-Abrasive Slurries for Tungsten CMP

ACE NanoTek is a South Korean company specializing in high-purity nano-materials and slurries. Their tungsten CMP slurries are designed to address the challenges of next-generation devices, with a strong emphasis on colloidal stability and minimal post-CMP contamination.

Innovation Initiatives:

• Proprietary synthesis of mono-dispersed nano-abrasives for superior surface finish

• Development of eco-friendly slurry formulations with reduced chemical waste

---

2️⃣ 9. Saint-Gobain Surface Conditioning

Headquarters: Worcester, Massachusetts, USA
Key Offering: Precision Abrasives and Formulated Slurries

Saint-Gobain, a world leader in materials, provides high-performance conditioning products and specialized slurries. Their offerings for tungsten CMP are part of a broader portfolio aimed at optimizing the entire polishing process for maximum wafer yield and performance.

Innovation Initiatives:

• Integration of CMP consumables (slurries, pads, conditioners) for process optimization

• Materials science research focused on extending consumable life and reducing cost of ownership

---

1️⃣ 10. Fiber Optics Co., Ltd.

Headquarters: Chungcheongbuk-do, South Korea
Key Offering: CMP Slurries for Semiconductor and Display Applications

Fiber Optics Co., Ltd. is a South Korean manufacturer of polishing materials, including slurries for tungsten CMP. The company serves the robust semiconductor ecosystem in South Korea and broader Asia, providing essential materials for memory and logic chip fabrication.

Innovation Initiatives:

• Expansion of product portfolio to cover advanced packaging and MEMS applications

• Investment in quality control systems to ensure batch-to-batch consistency

Get Full Report Here:
Tungsten CMP Slurry Market – View in Detailed Research Report

---

🌍 Outlook: The Future of Tungsten CMP Is Driven by Precision and Innovation

The tungsten CMP slurry market is undergoing a significant transformation. While foundational slurry chemistries remain vital, the industry is investing heavily in next-generation formulations, nanoparticle engineering, and process integration to meet the demands of sub-3nm nodes and beyond.

📈 Key Trends Shaping the Market:

• Development of highly selective slurries for novel transistor architectures like GAA-FETs and CFETs

• Increasing complexity of 3D NAND and DRAM structures driving demand for advanced planarization solutions

• Focus on reducing the environmental footprint of CMP through green chemistry and recycling

• Strategic collaborations between slurry suppliers, chipmakers, and equipment manufacturers for co-optimization

Get Full Report Here:
Tungsten CMP Slurry Market – View in Detailed Research Report

The companies listed above are not only enabling semiconductor manufacturing—they’re pioneering the material science innovations that will power the next generation of computing, AI, and data storage technologies.