The Global Chemical Polishing Slurry Market was valued at USD 1,608.2 Million in 2022 and is projected to reach USD 2,377.3 Million by 2029, growing at a Compound Annual Growth Rate (CAGR) of 5.7% during the forecast period (2023–2029). This robust growth is primarily driven by the escalating demand for advanced semiconductor devices, the proliferation of consumer electronics, the expansion of 5G infrastructure, and the critical need for ultra-flat surfaces in next-generation microchips. Chemical Mechanical Polishing/Planarization (CMP) slurry is an indispensable consumable in semiconductor fabrication, enabling the nanometer-level precision required for modern integrated circuits.

As the semiconductor industry relentlessly pursues smaller transistor nodes and more complex 3D architectures like FinFETs and GAA transistors, the role of specialized CMP slurries becomes increasingly vital. These sophisticated abrasive dispersions are the unsung heroes of chip manufacturing, ensuring the planarization of silicon wafers, interlayer dielectric (ILD) films, metal interconnects (copper, tungsten), and shallow trench isolation (STI) structures. In this analysis, we profile the Top 10 Companies in the Chemical Polishing Slurry Market—a mix of established global leaders and innovative specialists who are defining the future of semiconductor surface finishing.

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🔟 1. Cabot Microelectronics Corporation

Headquarters: Aurora, Illinois, USA
Key Offering: Comprehensive portfolio of CMP slurries for Dielectrics, Metals, and Barrier Layers

Cabot Microelectronics is the undisputed global leader in the CMP slurry market, commanding a significant market share. The company provides high-performance slurries for a wide array of applications, including silicon wafer polishing, STI, ILD, tungsten, and copper CMP. Its products are essential for manufacturing logic, memory, and analog semiconductors. Cabot’s deep expertise in colloidal silica, ceria, and alumina slurry chemistry makes it a preferred partner for leading foundries and IDMs worldwide.

Innovation and Market Focus:

• Pioneering advanced slurries for sub-5nm and 3nm technology nodes

• Strong R&D focus on low-defect, high-selectivity formulations

• Strategic partnerships with major semiconductor equipment manufacturers

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9️⃣ 2. DuPont (Formerly Dow Electronic Materials)

Headquarters: Wilmington, Delaware, USA
Key Offering: IC1000™ and other premier CMP slurries, pads, and conditioners

DuPont, following its acquisition of Dow, possesses a formidable Electronic Materials division with a rich legacy in CMP technologies. The company’s product portfolio is renowned for its quality and reliability, serving critical CMP steps in semiconductor fabrication. DuPont’s slurries are engineered for exceptional planarization efficiency and defect control, which are paramount for high-yield manufacturing of advanced memory (DRAM, NAND) and logic chips.

Innovation and Market Focus:

• Development of slurries for新兴 applications like silicon carbide (SiC) and gallium nitride (GaN) polishing

• Integrated CMP solutions combining slurries with pads and conditioners

• Focus on sustainable chemistry and reduced environmental impact

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8️⃣ 3. Fujimi Incorporated

Headquarters: Aichi, Japan
Key Offering: Specialized slurries for Silicon, SiO₂, SiC, and compound semiconductors

Fujimi Incorporated is a leading Japanese manufacturer of high-precision abrasives and a major global supplier of CMP slurries. The company has a strong reputation for its high-purity colloidal silica slurries, which are critical for polishing silicon wafers and oxide films. Fujimi has also developed significant expertise in slurries for hard-to-polish materials like silicon carbide, which is essential for power electronics and electric vehicles.

Innovation and Market Focus:

• Leading provider of slurries for the rapidly growing SiC wafer market

• Expansion of product lines for advanced packaging and 3D IC applications

• Strong presence in the Asia-Pacific region, the heart of semiconductor manufacturing

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7️⃣ 4. Air Products and Chemicals, Inc. (Versum Materials)

Headquarters: Allentown, Pennsylvania, USA
Key Offering: CMP slurries, precursor gases, and delivery systems

Air Products, after acquiring Versum Materials, became a powerful force in the semiconductor materials market. The company’s CMP slurry division offers a diverse range of products for polishing various materials used in chip fabrication. Their technical expertise in surface chemistry and particle technology allows them to develop slurries that meet the stringent requirements of leading-edge semiconductor processes.

Innovation and Market Focus:

• Leveraging a comprehensive portfolio of electronic materials to offer integrated solutions

• R&D focused on next-generation slurries for ultra-low-k dielectrics and new metal schemes

• Global manufacturing and supply chain to support fabs worldwide

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6️⃣ 5. Fujifilm Holdings Corporation

Headquarters: Tokyo, Japan
Key Offering: CMP slurries for copper, tungsten, and dielectric applications

Fujifilm, known for its imaging and healthcare businesses, is also a significant player in the electronic materials space. The company has developed advanced CMP slurry technologies that are used in the production of high-density semiconductors. Fujifilm’s slurries are designed to achieve superior surface quality and high removal rates, which are critical for improving manufacturing throughput and yield.

Innovation and Market Focus:

• Investment in R&D for slurries compatible with EUV lithography-based processes

• Expansion into slurries for through-silicon vias (TSVs) and other advanced packaging technologies

• Utilization of core expertise in nanomaterial and colloidal science

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5️⃣ 6. Hitachi Chemical Co., Ltd. (Part of Showa Denko Group)

Headquarters: Tokyo, Japan
Key Offering: CMP slurries, packaging materials, and other functional chemicals

Hitachi Chemical, now integrated into the Showa Denko Group, has a long-standing presence in the semiconductor materials industry. The company supplies high-performance CMP slurries that are essential for achieving the flat surfaces required at successive layers of a chip. Their products are used by major semiconductor manufacturers for a variety of CMP steps, contributing to the high performance and reliability of the final electronic devices.

Innovation and Market Focus:

• Development of environmentally friendly slurry formulations with reduced chemical waste

• Focus on slurries for memory applications, particularly for 3D NAND flash memory

• Synergies within the Showa Denko Group to enhance material development capabilities

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4️⃣ 7. Saint-Gobain

Headquarters: Courbevoie, France
Key Offering: High-purity abrasive grains, including those used in CMP slurries

Saint-Gobain is a global leader in the production of high-performance materials, including a range of advanced abrasives. While not solely a slurry manufacturer, the company is a critical supplier of high-purity raw materials, such as cerium oxide and aluminum oxide, which are fundamental components of CMP slurries. Its expertise in material science ensures the consistent quality and performance required for semiconductor-grade abrasives.

Innovation and Market Focus:

• Leading supplier of ceria (CeO₂) powders, a key abrasive for STI CMP

• Investment in the development of novel abrasive particles with tailored morphology and reactivity

• Commitment to sustainability through resource-efficient manufacturing processes

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3️⃣ 8. AGC Inc. (Formerly Asahi Glass Co., Ltd.)

Headquarters: Tokyo, Japan
Key Offering: Colloidal silica slurries, glass materials for semiconductors

AGC is a world-leading glass and chemical manufacturer with a strong electronic materials business. The company produces high-quality colloidal silica, which serves as the abrasive particle base for many CMP slurries used in oxide polishing. AGC’s deep understanding of glass and silica chemistry allows it to produce particles with exceptional purity, narrow size distribution, and controlled surface properties.

Innovation and Market Focus:

• Specialization in high-purity colloidal silica for the most demanding CMP applications

• Development of functionalized silica particles for improved CMP performance

• Vertical integration from raw material to finished slurry product

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2️⃣ 9. ACE Nanochem Inc.

Headquarters: Gyeonggi-do, South Korea
Key Offering: Specialty CMP slurries for semiconductor and display applications

ACE Nanochem is a specialized Korean company focused on the development and manufacturing of high-performance nano-materials, including CMP slurries. The company has carved out a niche by providing tailored slurry solutions for specific customer requirements, particularly in the dynamic memory and foundry markets of South Korea and Taiwan. Their agility and focus on customer collaboration make them a valued supplier.

Innovation and Market Focus:

• Rapid development of custom slurry formulations for new materials and processes

• Strong technical support and collaboration with leading Asian semiconductor makers

• Focus on next-generation slurries for MRAM and other emerging memory technologies

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1️⃣ 10. Anji Microelectronics Co., Ltd.

Headquarters: Shanghai, China
Key Offering: CMP slurries, targeting the domestic Chinese semiconductor market

Anji Microelectronics is a key Chinese player in the CMP slurry market, benefiting from the massive government-led push for semiconductor self-sufficiency. The company is focused on localizing the supply of critical semiconductor materials to serve the growing number of fabs in China. Anji is developing a range of slurries for various CMP applications to reduce reliance on imported materials.

Innovation and Market Focus:

• Strategic importance in China’s semiconductor supply chain localization efforts

• Investment in R&D to cover a broad spectrum of CMP slurry types

• Growth fueled by strong domestic demand and supportive government policies

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🔬 Outlook: The Future of Chemical Polishing Slurry Is More Precise and Specialized

The chemical polishing slurry market is at a critical juncture, driven by the semiconductor industry’s relentless march toward atomic-scale dimensions. While traditional silica and alumina slurries remain the workhorses, the future demands a new generation of highly specialized formulations.

📈 Key Trends Shaping the Market:

• Node Shrinkage Beyond 3nm: Development of slurries with atomic-level selectivity and ultra-low defects for Gate-All-Around (GAA) transistors and complementary FETs (CFETs).

• New Materials Integration: Slurries for novel channel materials (e.g., SiGe, Ge), high-mobility semiconductors, and ferroelectric materials in memory applications.

• Advanced Packaging: Growing demand for slurries tailored for hybrid bonding, silicon interposers, and through-silicon vias (TSVs) in 2.5D and 3D packaging.

• Sustainability and Cost Reduction: Increased focus on slurry recycling technologies, longer slurry life, and formulations that reduce water and chemical consumption.

The companies profiled above are not merely suppliers; they are essential innovation partners enabling the continued advancement of Moore’s Law and the digital transformation of the global economy. Their ability to deliver next-generation CMP solutions will directly impact the performance, power efficiency, and cost of future electronic devices.

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Chemical Polishing Slurry Market – View in Detailed Research Report