The Global Semiconductor Cleaning and Etching Gas Market was valued at USD 1.66 Billion in 2024 and is projected to reach USD 4.13 Billion by 2031, growing at a Compound Annual Growth Rate (CAGR) of 8.2% during the forecast period (2024–2031). This growth is driven by increasing semiconductor demand across industries including AI, 5G networks, electric vehicles, and IoT devices, coupled with advancements in semiconductor manufacturing processes requiring ultra-pure specialty gases.

As semiconductor fabrication nodes shrink below 7nm, the criticality of high-purity cleaning and etching gases has intensified. These specialized materials enable nanometer-scale precision in wafer processing – determining chip performance, yield rates, and manufacturing costs. This analysis profiles the Top 10 Semiconductor Cleaning and Etching Gas Companies enabling next-generation chip production.

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🔟 1. SK Materials

Headquarters: Gyeonggi-do, South Korea
Key Offering: NF₃, WF₆, SiF₄ specialty gases

As Korea’s premier electronic specialty gas producer, SK Materials commands 30% global market share for tungsten hexafluoride (WF₆) and maintains strategic alliances with Samsung and SK Hynix. The company specializes in precursor gases for deposition and etch processes in advanced memory chip fabrication.

Technical Capabilities:

• 99.9999% purity (6N) semiconductor-grade gas production
• On-site purification technologies for moisture/particle control
• 3000+ ton/year NF₃ production capacity expansion underway

Download FREE Sample Report: https://www.24chemicalresearch.com/download-sample/294198/global-semiconductor-cleaning-etching-gas-forecast-market-2025-2031-978

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9️⃣ 2. Kanto Denka Kogyo

Headquarters: Tokyo, Japan
Key Offering: CF₄, C₄F₆, C₅F₈ perfluorocarbon gases

The Japanese specialist leads in high-purity fluorine-based etching gases for dielectric materials, holding patents for several low-GWP alternatives to traditional PFCs. Their gases enable precise silicon nitride and oxide etching in 3D NAND and logic devices.

Technical Capabilities:

• Proprietary fluorine gas purification systems
• Eco-friendly etching gas formulations
• Particulate contamination control below 0.1μm

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8️⃣ 3. Resonac

Headquarters: Tokyo, Japan
Key Offering: BCl₃, ClF₃ metal etch gases

Formed from Showa Denko’s merger, Resonac dominates chlorine-based etching gases for metallization layers and high-aspect ratio structures. Their boron trichloride (BCl₃) is critical for aluminum and tungsten interconnect patterning.

Technical Capabilities:

• Ultra-high purity halogen gas production
• Custom gas mixtures for complex etch applications
• Closed-loop recycling systems for byproduct management

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7️⃣ 4. Linde Group

Headquarters: Guildford, UK
Key Offering: Bulk/specialty gas supply chains

The industrial gas giant provides end-to-end semiconductor gas solutions including on-site generation, purification, and delivery systems serving major foundries across North America, Europe and Asia.

Technical Capabilities:

• Global nitrogen trifluoride (NF₃) supply network
• Point-of-use purification technologies
• Hazardous gas handling expertise

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6️⃣ 5. Peric

Headquarters: Taipei, Taiwan
Key Offering: NF₃, SF₆ for Taiwan fabs

As TSMC’s primary specialty gas supplier, Peric provides localized high-purity gases tailored for advanced node manufacturing. The company has doubled its NF₃ capacity since 2022 to meet booming foundry demand.

Technical Capabilities:

• Wafer-level gas impurity analysis
• Just-in-time delivery to semiconductor parks
• ISO Class 1 cleanroom packaging

Download FREE Sample Report: https://www.24chemicalresearch.com/download-sample/294198/global-semiconductor-cleaning-etching-gas-forecast-market-2025-2031-978

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5️⃣ 6. Hyosung

Headquarters: Seoul, South Korea
Key Offering: NF₃ chamber cleaning gas

Hyosung has emerged as Korea’s second-largest NF₃ producer, supplying CVD tool cleaning applications to domestic memory makers. The company is investing $200 million to expand specialty gas output by 2026.

Technical Capabilities:

• Plasma-grade NF₃ with <5ppb impurities
• Cylinder surface passivation technologies
• Bulk delivery systems for high-volume fabs

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4️⃣ 7. Taiyo Nippon Sanso

Headquarters: Tokyo, Japan
Key Offering: Full fab gas solutions

The Mitsubishi-owned company provides comprehensive gas supply solutions including installation of high-purity pipelines and abatement systems for leading-edge semiconductor manufacturing facilities.

Technical Capabilities:

• Turnkey gas supply infrastructure
• AI-driven gas monitoring systems
• Ultra-clean gas cabinet designs

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3️⃣ 8. Merck KGaA

Headquarters: Darmstadt, Germany
Key Offering: Electronic specialty gas formulations

Merck’s Versum Materials division develops custom gas mixtures for advanced patterning technologies including extreme ultraviolet (EUV) lithography and atomic layer deposition (ALD).

Technical Capabilities:

• Precision gas blending technologies
• Sub-ppb impurity control
• Materials-gas co-optimization

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2️⃣ 9. Mitsui Chemical

Headquarters: Tokyo, Japan
Key Offering: C₄F₆, C₄F₈ etching gases

The chemical giant develops advanced fluorocarbon gases optimized for low-k dielectric etching in 3D chip architectures, with patented formulations reducing global warming potential by 30-50% versus standard PFCs.

Technical Capabilities:

• Green chemistry innovations
• High-selectivity etch gas development
• Byproduct minimization technologies

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1️⃣ 10. Air Liquide

Headquarters: Paris, France
Key Offering: End-to-end gas solutions

Air Liquide’s worldwide production network supplies all major semiconductor hubs with ultra-purity gases through on-site plants, microbulk delivery, and advanced cylinder technologies meeting increasingly stringent fab requirements.

Technical Capabilities:

• Global NF₃/H₂ supply infrastructure
• Cryogenic distillation purification
• Industry 4.0 gas monitoring

Get Full Report Here: https://www.24chemicalresearch.com/reports/294198/global-semiconductor-cleaning-etching-gas-forecast-market-2025-2031-978

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🌍 Market Outlook: Next-Generation Gas Solutions for Advanced Nodes

The semiconductor gas market is entering a transformative phase as chipmakers adopt gate-all-around transistors, hybrid bonding, and other 3D architectures requiring atomic-level precision in material removal and surface preparation.

📈 Key Development Areas:

• 6N-7N purity standards for sub-3nm nodes
• EUV-compatible gas chemistries
• Low-GWP alternative etching gases
• On-demand gas generation systems

Get Full Report Here: https://www.24chemicalresearch.com/reports/294198/global-semiconductor-cleaning-etching-gas-forecast-market-2025-2031-978

These market leaders are not just supplying gases – they’re co-engineering material solutions that will determine the feasibility of future chip technologies from AI accelerators to quantum computing devices.