Top 10 Companies in the EUV Pellicle Industry (2025): Market Leaders Powering Semiconductor Innovation

In Business Insights
June 06, 2025

The Global EUV Pellicle Market was valued at USD 72 Million in 2024 and is projected to reach USD 163 Million by 2031, growing at a Compound Annual Growth Rate (CAGR) of 9.3% during the forecast period (2024-2031). This rapid expansion is fueled by surging demand for sub-7nm semiconductor chips, the transition to high-power EUV lithography systems exceeding 500W, and breakthroughs in pellicle materials science.

As chipmakers push the boundaries of Moore’s Law with 3nm and below process nodes, EUV pellicles have become critical enablers for defect-free manufacturing. In this analysis, we examine the Top 10 Companies in the EUV Pellicle Industry – materials science innovators and semiconductor giants driving the next wave of chipmaking technology.


🔟 1. Mitsui Chemicals

Headquarters: Tokyo, Japan
Key Offering: Multi-layer EUV Pellicles (90% EUVT)

Mitsui Chemicals holds exclusive rights to ASML’s EUV pellicle technology and launched commercial production in 2021. Their cutting-edge pellicles use alternating layers of molybdenum disilicide (MoSi) and silicon (Si), achieving industry-leading 90% EUV transmittance (EUVT).

Technology Leadership:

  • Pioneering carbon nanotube (CNT) pellicle development for next-gen systems
  • New CNT production facility scheduled for 2025 completion
  • Strategic collaboration with ASML for continuous technology advancement

Download FREE Sample Report:
EUV Pellicle Market – View in Detailed Research Report


9️⃣ 2. S&S Tech

Headquarters: Hwaseong, South Korea
Key Offering: High-transmittance EUV Pellicles (>90% EUVT)

S&S Tech made history in 2021 by developing South Korea’s first commercial EUV pellicle, achieving groundbreaking >90% transmittance. The company now supplies major semiconductor manufacturers globally while enhancing pellicle durability for next-generation EUV systems.

Technology Leadership:

  • Focused on thermal stability improvements for 500W+ EUV applications
  • Building domestic supply chain to strengthen Korea’s semiconductor ecosystem

8️⃣ 3. Canatu

Headquarters: Vantaa, Finland
Key Offering: Carbon Nanotube (CNT) EUV Pellicles

Canatu has partnered with research leader Imec since 2015 to develop next-generation CNT-based EUV pellicles. Their innovative approach combines exceptional thermal durability with high EUV transmittance for advanced semiconductor nodes.

Technology Leadership:

  • CNT pellicles offer superior mechanical and thermal properties
  • Scaling production for high-volume manufacturing adoption

7️⃣ 4. TSMC

Headquarters: Hsinchu, Taiwan
Key Offering: In-house EUV Pellicle Solutions

As the world’s leading foundry, TSMC has vertically integrated EUV pellicle development to support its cutting-edge 3nm and 2nm processes. The company’s proprietary solutions ensure reliable pellicle supply for its advanced manufacturing operations.

Technology Leadership:

  • Custom pellicle designs optimized for TSMC’s process nodes
  • Significant investments in next-generation pellicle materials

Download FREE Sample Report:
EUV Pellicle Market – View in Detailed Research Report


6️⃣ 5. FST

Headquarters: Hsinchu, Taiwan
Key Offering: Emerging EUV Pellicle Technologies

Formosa Smart Technology (FST) is developing homegrown EUV pellicle solutions to strengthen Taiwan’s semiconductor supply chain. While still in development, the company aims to provide localized pellicle production for Asian chipmakers.

Technology Leadership:

  • Focusing on extending pellicle lifespan and defect reduction
  • Developing cost-effective solutions for high-volume production

5️⃣ 6. ASML

Headquarters: Veldhoven, Netherlands
Key Offering: Original EUV Pellicle Technology

ASML pioneered EUV pellicle technology before licensing it to Mitsui Chemicals. The company continues fundamental research into next-gen pellicle materials while focusing on its core EUV lithography systems leadership.

Technology Leadership:

  • Developed initial polysilicon pellicle technology (2019)
  • Ongoing materials research for future EUV generations

4️⃣ 7. Samsung Electronics

Headquarters: Suwon, South Korea
Key Offering: Captive EUV Pellicle Solutions

Samsung has developed internal EUV pellicle capabilities to support its advanced semiconductor manufacturing. The company’s solutions are tailored for its 3nm GAA (Gate-All-Around) process technology.

Technology Leadership:

  • Custom pellicle designs for Samsung’s specific process requirements
  • Investing in advanced materials to boost yield and reliability

3️⃣ 8. Intel Corporation

Headquarters: Santa Clara, California, USA
Key Offering: Proprietary EUV Pellicle Development

Intel has invested in developing its own EUV pellicle technology as part of its IDM 2.0 strategy. The company’s solutions support its aggressive roadmap through Intel 18A and beyond process technologies.

Technology Leadership:

  • Developing pellicles optimized for high-NA EUV systems
  • Focus on defect reduction for leading-edge nodes

2️⃣ 9. GlobalFoundries

Headquarters: Malta, New York, USA
Key Offering: Specialized EUV Pellicles

While focusing on more mature nodes, GlobalFoundries maintains EUV pellicle expertise for specialized applications. The company collaborates with partners to ensure reliable pellicle supply for its EUV processes.

Technology Leadership:

  • Cost-optimized solutions for established EUV nodes
  • Strategic partnerships with materials suppliers

1️⃣ 10. Applied Materials

Headquarters: Santa Clara, California, USA
Key Offering: EUV Pellicle Materials & Equipment

Applied Materials provides foundational technologies enabling EUV pellicle manufacturing. While not a direct producer, its deposition systems and materials expertise empower the production of advanced pellicle structures.

Technology Leadership:

  • Deposition systems for multi-layer pellicle fabrication
  • Materials science supporting next-gen pellicle development

Get Full Report Here:
EUV Pellicle Market – View in Detailed Research Report


🌍 Outlook: The Future of EUV Pellicles is Thinner and More Advanced

The EUV pellicle market is undergoing rapid evolution as semiconductor manufacturing pushes below 3nm process nodes. While multi-layer structures currently dominate, the industry is transitioning to CNT and other advanced materials for superior performance.

📈 Key Market-Shaping Trends:

  • Transition from silicon-based to CNT pellicles for enhanced EUVT and thermal stability
  • Increasing durability requirements for high-power (500W+) EUV systems
  • Growing foundry investments in captive pellicle capabilities
  • Regional supply chain development for manufacturing resilience

Get Full Report Here:
EUV Pellicle Market – View in Detailed Research Report

The companies profiled above represent the vanguard of EUV pellicle innovation, developing the critical technologies that will enable the next generation of semiconductor manufacturing breakthroughs.